MS 5342 Nano/Microelectromechanical Systems
Objective：
The objective
of this course is to provide students fundamental knowledge about Nano- and
Microelectromechanical systems. The design process, fabrication
techniques and potential applications for NEMS and MEMS will be covered.
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Textbook：
Foundations of MEMS, C. Liu, Pearson
Education 2006
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Reference Books：
MEMS
and NEMS, Systems, Devices, and Structures, S. E. Lyshevski, CRC Press 2002
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Microsystem
Design, S. D. Senturia, Kluwer Academic Publishers 2001
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奈微米工程精密製程與量測技術，馮榮豐主編，滄海書局
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奈米材料導論，曹茂盛等編著，學富文化事業
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Outline：
Lecture 1
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Introductions
of Nano/Micro Electro-Mechanical System
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Lecture 2
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Micro-process
technology – Photolithography
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Lecture 3
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Micro-process
technology - Thin film deposition
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Lecture 4
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Micro-process
technology -
Etching process
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Lecture 5
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Novel
MEMS/NEMS Process technology
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Lecture 6
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Electrical
and mechanical sensing and actuation
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Lecture 7
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Thermal
sensing and actuation
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Lecture 8
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Piezoresistive,
piezoelectric & magnetic sensing and actuation
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Lecture 9
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Nano-scale structure, physics
and applications
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Lecture 10
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Case studies
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Class notes：
